JPH0358043B2 - - Google Patents

Info

Publication number
JPH0358043B2
JPH0358043B2 JP3863983A JP3863983A JPH0358043B2 JP H0358043 B2 JPH0358043 B2 JP H0358043B2 JP 3863983 A JP3863983 A JP 3863983A JP 3863983 A JP3863983 A JP 3863983A JP H0358043 B2 JPH0358043 B2 JP H0358043B2
Authority
JP
Japan
Prior art keywords
light
scale
half mirror
reflected
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3863983A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59163517A (ja
Inventor
Koji Akyama
Hideto Iwaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP3863983A priority Critical patent/JPS59163517A/ja
Publication of JPS59163517A publication Critical patent/JPS59163517A/ja
Publication of JPH0358043B2 publication Critical patent/JPH0358043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP3863983A 1983-03-09 1983-03-09 光学式スケ−ル読取装置 Granted JPS59163517A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3863983A JPS59163517A (ja) 1983-03-09 1983-03-09 光学式スケ−ル読取装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3863983A JPS59163517A (ja) 1983-03-09 1983-03-09 光学式スケ−ル読取装置

Publications (2)

Publication Number Publication Date
JPS59163517A JPS59163517A (ja) 1984-09-14
JPH0358043B2 true JPH0358043B2 (en]) 1991-09-04

Family

ID=12530807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3863983A Granted JPS59163517A (ja) 1983-03-09 1983-03-09 光学式スケ−ル読取装置

Country Status (1)

Country Link
JP (1) JPS59163517A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101137666B1 (ko) * 2010-12-28 2012-04-20 주식회사 동양기술개발 액상 혼합물에 있는 고형분 농도 검출장치.

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0690052B2 (ja) * 1987-06-12 1994-11-14 株式会社東京精密 光学干渉装置
JPS63309817A (ja) * 1987-06-12 1988-12-16 Tokyo Seimitsu Co Ltd リニアエンコ−ダ
JP2582272B2 (ja) * 1987-12-24 1997-02-19 株式会社 東京精密 リニアエンコ−ダ
JPH02147816A (ja) * 1988-11-29 1990-06-06 Tokyo Seimitsu Co Ltd スケール読取装置
JP2629606B2 (ja) * 1994-07-08 1997-07-09 キヤノン株式会社 エンコーダー
US7636165B2 (en) 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
JP2013145863A (ja) * 2011-11-29 2013-07-25 Gigaphoton Inc ２光束干渉装置および２光束干渉露光システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101137666B1 (ko) * 2010-12-28 2012-04-20 주식회사 동양기술개발 액상 혼합물에 있는 고형분 농도 검출장치.

Also Published As

Publication number Publication date
JPS59163517A (ja) 1984-09-14

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